{"product_id":"siasun-tss-industrial-robot","title":"SIASUN TSS-3000 EFEM Wafer-Handling Robot","description":"\u003cp\u003eThe SIASUN TSS-3000 is an EFEM (Equipment Front End Module) for semiconductor manufacturing, serving as the controlled interface between a fab's material transport system and a process tool's internal transfer environment. It coordinates wafer loading, alignment and hand-off while helping maintain contamination control and standardized, SEMI-compatible equipment communication.\nDesigned with a small footprint, the TSS-3000 uses a dual-arm transfer robot with an external axis to move wafers manually or in coordination with factory transport such as overhead systems, supporting high-efficiency, repeatable wafer handling at the tool front end. It is suited to cleanroom wafer-fab environments where standardized interfaces and reduced operator contact with critical substrates are required. Contact us for pricing and availability.\u003c\/p\u003e","brand":"SIASUN","offers":[{"title":"Default Title","offer_id":49736052146413,"sku":"SIASUN-TSS-3000","price":0.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0803\/2613\/1949\/files\/tss3000_9b42a0a3-03a5-4334-9c7e-dc0dc1e7b415.jpg?v=1774885283","url":"https:\/\/robotixmarket.at\/en\/products\/siasun-tss-industrial-robot","provider":"Robotix Market","version":"1.0","type":"link"}